High resolution dopant profiling in the SEM, image widths and surface band-bending

Journal of Physics: Conference Series

Volumn 126, Issue , 2008, Pages

  Chee, K W A ^a   Rodenburg, C ^b   Humphreys, C J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 65649114006     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/126/1/012033     Document Type: Article

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