Capability of focused Ar ion beam sputtering for combinatorial synthesis of metal films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 3, 2009, Pages 492-495

  Nagata, T ^a   Haemori, M ^a   Chikyow, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY FILMS; COMBINATORIAL METHODS; COMBINATORIAL SYNTHESIS; COMBINATORIAL THIN FILMS; CUBIC STRUCTURES; HEXAGONAL STRUCTURES; HIGH QUALITIES; ION-BEAM SPUTTERING; METAL FILM DEPOSITIONS; METAL FILMS; PT-RU ALLOYS; SMOOTH SURFACES; TERRACE STRUCTURES; ZNO SUBSTRATES;

ALLOYS; CRYSTAL STRUCTURE; FILM GROWTH; ION BEAMS; METALLIC FILMS; METALS; PHASE DIAGRAMS; PLATINUM; PLATINUM ALLOYS; PULSED LASER DEPOSITION; SOIL CONSERVATION; SPUTTERING; ZINC OXIDE;

RUTHENIUM ALLOYS;

EID: 65549126936     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3097847     Document Type: Article

References (16)

1. X. D. Xiang, Science 286, 1738 (1995).
2. T. Fukumura, Appl. Phys. Lett. 75, 1967 (1999).
3. H. Koinuma and I. Takeuchi, Nature Mater. 3, 429 (2004).
4. N. Cherief, D. Givord, A. Línard, K. Mackay, O. F. K. McGrath, J. P. Rebouillat, F. Robaut, and Y. Souche, J. Magn. Magn. Mater. 121, 94 (1993).
5. J. Sakurai, S. Hata, and A. Shimokohbe, Proc. SPIE 5650, 260 (2005).
6. P. Ahmet, T. Nagata, D. Kukuruznyak, S. Yagyu, Y. Wakayama, M. Yoshitake, and T. Chikyow, Appl. Surf. Sci. 252, 2472 (2006).
7. H. Mott-Smith and I. Langmuir, Phys. Rev. 28, 727 (1926).
8. Mu-Shiang. Wu, A. Azuma, T. Shiosaki, and A. Kawabata, J. Appl. Phys. 62, 2482 (1987).
9. N. Chubachi, Proc. IEEE 64, 772 (1976).
10. A. Tsukazaki, Nature Mater. 4, 42 (2005).
11. J. E. Heidenreich III, J. R. Paraszczak, M. Moisan, and G. Suave, J. Vac. Sci. Technol. B 5, 347 (1987).
12. A. A. Shatas, Y. Z. Hu, and E. A. Irene, J. Vac. Sci. Technol. A 10, 3119 (1992).
13. R. Behrisch, Sputtering by Bombardment I (Springer, Berlin, 1981).
14. K. Macak, V. Kouznetsov, J. Schneider, U. Helmersson, and I. Petrov, J. Vac. Sci. Technol. A 18, 1533 (2000).
15. T. Nagata, Y. Z. Yoo, P. Ahmet, and T. Chikyow, Jpn. J. Appl. Phys., Part 1 44, 7896 (2005).
16. J. M. Hutchinson, Jr., Platinum Met. Rev. 16, 88 (1972).