Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-light-emitting diode on SiC substrate

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7216, Issue , 2009, Pages

  Seko, T ^a   Mabuchi, S ^a   Teramae, F ^b   Suzuki, A ^b   Kaneko, Y ^b   Kawai, R ^a   Kamiyama, S ^a   Iwaya, M ^a   Amano, H ^a   Akasaki, I ^a  

^a MEIJO UNIVERSITY   (Japan)

^b Advanced Research Laboratory   (Japan)

Author keywords

Electron beam; LED; Light extraction; Moth eye; Nitride; Periodic cone; SiC

Indexed keywords

LED; LIGHT EXTRACTION; MOTH-EYE; PERIODIC CONE; SIC;

CURRENT DENSITY; ELECTRON BEAMS; ELECTRONS; EXTRACTION; FABRICATION; GALLIUM ALLOYS; GALLIUM NITRIDE; LIGHT EMISSION; LIGHT EMITTING DIODES; PHOTOLITHOGRAPHY; SEMICONDUCTING GALLIUM; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SUBSTRATES; SURFACE STRUCTURE;

PERIODIC STRUCTURES;

EID: 65349189507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.811348     Document Type: Conference Paper

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