Comparison of indentation and scribing behaviors of crystalline and initially deformed silicon tips by molecular dynamics simulation

IEEE Transactions on Magnetics

Volumn 45, Issue 5, 2009, Pages 2328-2331

  Kim, Hyun Joon ^a   Oh, Tae Seok ^a   Kim, Dae Eun ^a  

^a Yonsei University   (South Korea)

Author keywords

Friction; Silicon; Simulation; Strain

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; DEFORMATION; FRICTION; MOLECULAR DYNAMICS; NANOSYSTEMS; PROBES; SILICON; STRAIN;

BOND-ANGLE DISTRIBUTION; CRYSTALLINE AND AMORPHOUS SILICON; FRICTIONAL CHARACTERISTICS; MECHANICAL INTEGRITY; MICRO AND NANO SYSTEMS; MOLECULAR DYNAMICS SIMULATIONS; SIMULATION; TETRAHEDRAL STRUCTURES;

AMORPHOUS SILICON;

EID: 65349122936     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2016518     Document Type: Article

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