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Applied Physics Letters

Volumn 94, Issue 15, 2009, Pages

Film bulk acoustic-wave resonator based ultraviolet sensor

(6) Qiu, X a Zhu, J b Oiler, J b Yu, C a Wang, Z b Yu, H a,b

a Arizona State University (United States)

b ARIZONA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTION LIMITS; FILM BULK ACOUSTIC-WAVE RESONATORS; LOW INTENSITIES; OXYGEN DESORPTIONS; RADIATION-SENSING; RESONANT FREQUENCIES; ULTRA VIOLETS; ULTRAVIOLET SENSORS; UV ILLUMINATIONS; UV LIGHTS; UV SENSORS; ZNO; ZNO FILMS; ZNO SURFACES;

ACOUSTIC EQUIPMENT; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTICS; DESORPTION; METALLIC FILMS; NATURAL FREQUENCIES; OXYGEN; RESONATORS; SENSORS; ULTRAVIOLET DEVICES; ZINC OXIDE;

SEMICONDUCTING ZINC COMPOUNDS;

EID: 65249164036 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3122342 Document Type: Article

Times cited : (67)

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