Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3466-3471

  Le Normand, F ^a   Gulas, M ^a,b   Veis, P ^b   Cojocaru, C S ^c   Bouree J E ^c  

^a INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

^b Faculty of Natural Sciences   (Slovakia)

^c LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Carbon nanotubes; Gas phase kinetics; Hot wire chemical vapor deposition; Surface kinetics

Indexed keywords

CARBON NANOSTRUCTURES; CATALYTIC CHEMICAL VAPOR DEPOSITIONS; CATALYTIC GROWTHS; EXPERIMENTAL OBSERVATIONS; GAS PHASE KINETICS; GAS-PHASE; GAS-PHASE CHEMISTRIES; GAS-PHASE COMPOSITIONS; HOT FILAMENTS; HOT-WIRE CHEMICAL VAPOR DEPOSITION; LINEAR GROWTH RATES; SURFACE KINETICS;

ATOMIC SPECTROSCOPY; CARBON NANOTUBES; DIAMOND FILMS; EMISSION SPECTROSCOPY; FILAMENTS (LAMP); GAS DYNAMICS; LEAKAGE (FLUID); MOLECULAR SPECTROSCOPY; NANOSTRUCTURES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEPOSITION; PLASMAS; SURFACE REACTIONS; VAPOR DEPOSITION; VAPORS; WIRE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 64649103591     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.079     Document Type: Article

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