Synthesis of multi-walled carbon nanotubes by combining hot-wire and dc plasma-enhanced chemical vapor deposition

Thin Solid Films

Volumn 501, Issue 1-2, 2006, Pages 227-232

  Sorin Cojocaru, Costel ^a   Kim, Dohyung ^a   Pribat, Didier ^a   Bourée, Jean Eric ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Carbon nanotubes; Hot wire assisted direct current plasma enhanced chemical vapor deposition

Indexed keywords

ELECTRON EMISSION; NICKEL; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CRYSTALLINE SILICON; HOT-WIRE;

CARBON NANOTUBES;

EID: 32644443991     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.162     Document Type: Conference Paper

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