Resistance characteristics to oxidation of the metal-catalyzer for Cat-CVD

Thin Solid Films

Volumn 517, Issue 12, 2009, Pages 3443-3445

  Kudoh, Tsugutomo ^a   Ogita, Yoh Ichiro ^a  

^a KANAGAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Catalytic CVD; Metal catalyzer; Resistance characteristics to oxidation

Indexed keywords

CAT-CVD; CATALYTIC CHEMICAL VAPOR DEPOSITIONS; CATALYTIC CVD; HASTELLOY C-276; INCONEL; KANTHAL; RESISTANCE CHARACTERISTICS TO OXIDATION;

ALUMINUM; CATALYTIC OXIDATION; ELECTRIC HEATING ELEMENTS; METALS; NICKEL; NICKEL ALLOYS; NICKEL OXIDE; OXIDATION; OXIDE FILMS; PLATINUM;

CHEMICAL VAPOR DEPOSITION;

EID: 64349105641     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.048     Document Type: Article

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