Formation of a porous alumina electrode as a low-cost CMOS neuronal interface

Sensors and Actuators, B: Chemical

Volumn 138, Issue 1, 2009, Pages 296-303

  Graham, Anthony H D ^a   Bowen, Chris R ^b   Robbins, Jon ^c   Taylor, John ^a  

^a University of Bath   (United Kingdom)

^b University of Bath   (United Kingdom)

^c KING'S COLLEGE LONDON   (United Kingdom)

Author keywords

Anodic aluminium oxide; Biocompatibility; CMOS; Corrosion; Electrode; Neuron

Indexed keywords

ANODIC ALUMINIUM OXIDE; ANODISATION; CELL-BASED BIOSENSORS; CELL-SUBSTRATE ADHESIONS; CMOS; CMOS (COMPLEMENTARY METAL OXIDE SEMICONDUCTOR); CMOS CIRCUITS; CMOS DEVICES; CORROSION PERFORMANCE; CORROSION TESTS; DENSITY SCALING; DRUG DISCOVERIES; ELECTRODE DESIGNS; INTEGRATED CIRCUIT TECHNOLOGIES; METALLISATION; NANOPOROUS ALUMINAS; NEURAL INTERFACE SYSTEMS; NEURONAL INTERFACES; NEUROTOXICITY; PHYSIOLOGICAL CONDITIONS; POROUS ALUMINAS; SCALING FACTORS; THIN-FILM;

ALUMINUM; BIOCOMPATIBILITY; BIOSENSORS; CHARGE COUPLED DEVICES; INTEGRATED CIRCUITS; INTELLIGENT CONTROL; METALLIC COMPOUNDS; MOS DEVICES; OXIDES; SEMICONDUCTOR MATERIALS; SUBSTRATES;

CORROSION RESISTANCE;

EID: 64149122508     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.01.050     Document Type: Article

References (54)

1. Kawahara M., Kato M., and Kuroda Y. Effects of aluminum on the neurotoxicity of primary cultured neurons and on the aggregation of beta-amyloid protein. Brain Research Bulletin 55 (2001) 211-217
2. Perl D.P., and Moalem S. In: Perry G. (Ed). Alzheimer's Disease: A Century of Scientific and Clinical Research (2006), IOS Press, Amsterdam, Netherlands 291-300
3. Heer F., Franks W., Blau A., Taschini S., Ziegler C., Hierlemann A., and Baltes H. CMOS microelectrode array for the monitoring of electrogenic cells. Biosensors & Bioelectronics 20 (2004) 358-366
4. Berdondini L., van der Wal P.D., de Rooij N.F., and Koudelka-Hep M. Development of an electroless post-processing technique for depositing gold as electrode material on CMOS devices. Sensors and Actuators B: Chemical 99 (2004) 505-510
5. Dini J.W. Electrodeposition: The Materials Science of Coatings and Substrates (1993), Noyes, Park Ridge pp. 304-313
6. Virtanena S., Milošev I., Gomez-Barrena E., Trebše R., Salo J., and Konttinen Y.T. Special modes of corrosion under physiological and simulated physiological conditions. Acta Biomaterials 4 (2008) 468-476
7. In: Nishi Y., and Doering R. (Eds). Handbook of Semiconductor Manufacturing Technology (2000), Dekker, New York
8. Semiconductor Industry Association. International Technology Roadmap For Semiconductors 1997 Edition: Technology Needs (1997), Semiconductor Industry Association
9. International Technology Roadmap For Semiconductors. International Technology Roadmap For Semiconductors 2007 Edition: Interconnect (2007), ITRS
10. Bayliss S.C., Buckberry L.D., Harris P.J., and Tobin M. Nature of the silicon-animal cell interface. Journal of Porous Materials 7 (2000) 191-195
11. Low S.P., Williams K.A., Canham L.T., and Voelcker N.H. Evaluation of mammalian cell adhesion on surface-modified porous silicon. Biomaterials 27 (2006) 4538-4546
12. Sapelkin A.V., Bayliss S.C., Unal B., and Charalambou A. Interaction of B50 rat hippocampal cells with stain-etched porous silicon. Biomaterials 27 (2006) 842-846
13. Sabnis A.G. VLSI Reliability (VLSI Electronics Microstructure Science 22) (1990), Academic Press, London
14. Moxon K.A., Kalkhoran N.M., Markert M., Sambito M.A., McKenzie J.L., and Webster J.T. Nanostructured surface modification of ceramic-based microelectrodes to enhance biocompatibility for a direct brain-machine interface. IEEE Transactions on Biomedical Engineering 51 (2004) 881-889
15. Johansson F., Kanje M., Linsmeier C.E., and Wallman L. The influence of porous silicon on axonal outgrowth in vitro. IEEE Transactions on Biomedical Engineering 55 (2008) 1447-1449
16. Sorribas H., Braun D., Leder L., Sonderegger P., and Tiefenauer L. Adhesion proteins for a tight neuron-electrode contact. Journal of Neuroscience Methods 104 (2001) 133-141
17. Prasad P., and Quijano J. Development of nanostructured biomedical micro-drug testing device based on in situ cellular activity monitoring. Biosensors & Bioelectronics 21 (2006) 1219-1229
18. Wolfrum B., Mourzina Y., Sommerhage F., and Offenhäusser A. Suspended nanoporous membranes as interfaces for neuronal biohybrid systems. Nano Letters 6 (2006) 453-457
19. Walpole A.R., Briggs E.P., Karlsson M., Pålsgård E., and Wilshaw P.R. Nano-porous alumina coatings for improved bone implant interfaces. Materialwissenschaft und Werkstofftechnik 34 (2003) 1064-1068
20. Karlsson M., Pålsgård E., Wilshaw P.R., and Silvio D. Initial in vitro interaction of osteoblasts with nano-porous alumina. Biomaterials 24 (2003) 3039-3046
21. Leary Swan E.E., Popat K.C., Grimes C.A., and Desai T.A. Fabrication and evaluation of nanoporous alumina membranes for osteoblast culture. Journal of Biomedical Materials Research: Part A 72A (2005) 288-295
22. Hoess A., Teuscher N., Thormann A., Aurich H., and Heilmann A. Cultivation of hepatoma cell line HepG2 on nanoporous aluminum oxide membranes. Acta Biomaterials 3 (2007) 43-50
23. Karlsson M., Johansson A., Tang L., and Boman M. Nanoporous aluminum oxide affects neutrophil behaviour. Microscopic Research and Technique 63 (2004) 259-265
24. Van Zant P. Microchip Fabrication. 5th ed. (2004), McGraw-Hill, London, UK
25. Ingebrandt S., Yeung C.K., Krause M., and Offenhäusser A. Neuron-transistor coupling: interpretation of individual extracellular recorded signals. European Biophysics Journal 34 (2005) 144-154
26. + channels by capacitive stimulation from silicon chip. Applied Physics A: Materials Science & Processing 81 (2005) 887-891
27. Gleixner R., and Fromherz P. The extracellular electrical resistivity in cell adhesion. Biophysics Journal 90 (2006) 2600-2611
28. Prakash S.B., and Abshire P. A CMOS capacitance sensor that monitors cell viability. IEEE Sensors Journal 1-2 (2005) 1177-1180
29. Cohen A., Shappir J., Yitzchaik S., and Spira M.E. Reversible transition of extracellular field potential recordings to intracellular recordings of action potentials generated by neurons grown on transistors. Biosensors & Bioelectronics 23 (2008) 811-819
30. Starzak M. The Physical Chemistry of Membranes (1984), Academic Press, Orlando
31. Robinson D.A. The electrical properties of metal microelectrodes. Proceedings of the IEEE 56 (1968) 1065-1071
32. Ouerd A., Alemany-Dumont C., Berthomé G., Normand B., and Szunerits S. Reactivity of titanium in physiological medium I. Electrochemical characterization of the metal/protein interface. Journal of Electrochemical Society 154 (2007) C593-C601
33. Franks W., Schenker I., Schmutz P., and Hierlemann A. Impedance characterization and modeling of electrodes for biomedical applications. IEEE Transactions on Biomedical Engineering 52 (2006) 1295-1302
34. Potucek R.K., Rateick R.G., and Birss V. Impedance characterization of anodic barrier Al oxide film beneath porous oxide layer. Journal of Electrochemical Society 153 (2006) B304-B310
35. van der Linden B., Terryn H., and Vereecken J. Investigation of anodic aluminium oxide layers by electrochemical impedance spectroscopy. Journal of Applied Electrochemistry 20 (1990) 798-803
36. Feliu Jr. S., Gonzalez J.A., Lopez V., Bartolome M.J., Escudero E., and Otero E. Characterisation of porous and barrier layers of anodic oxides on different aluminium alloys. Journal of Applied Electrochemistry 37 (2007) 1027-1037
37. Cogger N.D., and Evans N.J. An introduction to Electrochemical Impedance Measurement (1999), Solarton Ltd., Farnborough, UK
38. Chu S.Z., Wada K., Inoue S., and Todoroki S. Formation and microstructures of anodic alumina films from aluminum sputtered on glass substrate. Journal of Electrochemical Society 149 (2002) B321-B327
39. 3 films incorporating Ag within the pores. International Journal of Electronics 54 (1983) 21-30
40. Koh G., Agarwal S., Cheow P.S., and Toh C.S. Characterization of the barrier layer of nanoporous alumina films prepared using two different contact configurations. Electrochimica Acta 52 (2007) 2815-2821
41. Sulka G.D., Moshchalkov V., Borghs G., and Celis J.P. Electrochemical impedance spectroscopic study of barrier layer thinning in nanostructured aluminium. Journal of Applied Electrochemistry 37 (2007) 789-797
42. Furneaux R.C., Rigby W.R., and Davidson A.P. The formation of controlled-porosity membranes from anodically oxidized aluminium. Nature 337 (1989) 147-149
43. O'Sullivan J.P., and Wood G.C. The morphology and mechanism of formation of porous anodic films on aluminium. Proceedings of the Royal Society of London Series A-Mathematical and Physical Sciences 317 (1970) 511-543
44. Wernick S., and Pinner R. The Surface Treatment and Finishing of Aluminium and its Alloys. 4th ed. vol. 1 (1971), Draper, Teddington, UK
45. Li Y., Zheng M., Ma L., and Shen W. Fabrication of highly ordered nanoporous alumina films by stable high-field anodisation. Nanotechnology 17 (2006) 5101-5105
46. Masuda H., Yamada H., Satoh M., Asoh H., Nakao M., and Tamamura T. Highly ordered nanochannel-array architecture in anodic alumina. Applied Physics Letters 71 (1997) 2770-2772
47. Choi D.H., Lee P.S., Hwang W., Lee K.H., and Park H.C. Measurement of the pore sizes for anodic aluminum oxide (AAO). Current Applied Physics 6 (2006) e125-e129
48. Al-Mawlawi D., Liu C.Z., and Moskovits M. Nanowires formed in anodic oxide nanotemplates. Journal of Materials Research 9 (1994) 1014-1018
49. Myung N.V., Lim J., Fleurial J.P., Yun M., West W., and Choi D. Alumina nanotemplate fabrication on silicon substrate. Nanotechnology 15 (2004) 833-838
50. Abramoff M.D., Magelhaes P.J., and Ram S.J. Image processing with ImageJ. Biophoton International 11 (2004) 36-42
51. Ono S., Saito M., and Asoh H. Self-ordering of anodic porous alumina formed in organic acid electrolytes. Electrochimica Acta 51 (2005) 827-833
52. Montero-Moreno J.M., Sarret M., and Müller C. Some considerations on the influence of voltage in potentiostatic two-step anodizing of AA1050. Journal of Electrochemical Society 154 (2007) C169-C174
53. In: Totten G.E., and Scott MacKenzie D. (Eds). Handbook of Aluminum: Alloy Production and Materials Manufacturing vol. 2 (2003), Dekker, New York
54. Austriamicrosystems AG, 0.8 μm CMOS CXQ Process Parameters, Munich, Germany, Austriamicrosystems AG, 2008, 9933013.