Research on micromachined Pirani Gauge

Chinese Journal of Sensors and Actuators

Volumn 21, Issue 3, 2008, Pages 513-516

  Zhou, Ji Long ^a   Chen, Ken Le ^a   Zhang, Jin Wen ^a   Jin, Yu Feng ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

MEMS; Pirani gauge; Vacuum monitor; Vacuum packaging

Indexed keywords

EID: 63749096979     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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6. Chinese source
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