Comparison of numerical aperture increasing lens and standard subsurface microscopy

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2001, Pages 774-775

  Ippolito, S B ^a   Goldberg, B B ^a   Unlu M S ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; OPTICAL TRANSFER FUNCTION; SEMICONDUCTING SILICON; STATIC RANDOM ACCESS STORAGE;

DIELECTRIC INTERFACES;

INTEGRATED CIRCUITS;

EID: 0035653411     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. High spatial resolution subsurface microscopy
2. High resolution subsurface microscopy technique
3. High-resolution IC inspection technique
4. Near-field optical data storage using a solid immersion lens
5. Near-field optical data storage
6. Enhanced reflectivity contrast in confocal solid immersion lens microscopy