Focused ion beam machining for optical microlens fabrication

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 A, 2002, Pages 4019-4021

  Kitamura, Masaru ^a   Koike, Eijiro ^a   Takasu, Noburu ^a   Nishimura, Tetsuro ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Error; Focused ion beam; Lens; Machining efficiency; Optical microlens; Redeposition; Sputter machining

Indexed keywords

COMPUTER CONTROL SYSTEMS; FOCUSING; MACHINING; MATHEMATICAL MODELS; MICROLENSES; OPTICAL DEVICES; SCANNING; SEMICONDUCTING GALLIUM; SEMICONDUCTOR DEVICE MANUFACTURE; SPUTTERING;

FOCUSED ION BEAM MACHINING; OPTICAL LENS; REDEPOSITION; SPUTTER MACHINING;

ION BEAMS;

EID: 0036614472     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4019     Document Type: Article

References (11)