Robust mask-layout synthesis for MEMS

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 128-131

  Ma, Lin ^a   Antonsson, Erik K ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Mail Code:104 44 ^*  (United States)

Author keywords

Genetic algorithm; MEMS; Robust design; Synthesis

Indexed keywords

GENETIC ALGORITHMS; MASKS; OPTIMIZATION; RANDOM PROCESSES; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS;

FABRICATION VARIATIONS; MASK-LAYOUT SYNTHESIS; PROCESS SYNTHESIS; ROBUST DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 6344249472     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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