Improved performance of Si-based spiral inductors

IEEE Microwave and Wireless Components Letters

Volumn 14, Issue 10, 2004, Pages 466-468

  Chen, Tung Sheng ^a   Deng, Joseph Der Son ^a   Lee, Chih Yuan ^a   Kao, Chin Hsing ^a  

^a NATIONAL DEFENSE UNIVERSITY   (Taiwan)

Author keywords

Proton implant; Q value; Radio frequency integrated circuit (RFIC); Shielding poly; Silicon on insulator (SOI); Spiral inductor

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DATA ACQUISITION; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; ENERGY DISSIPATION; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

PROTON IMPLANT; RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC); SHIELDING POLY; SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 6344223497     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2004.834552     Document Type: Article

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