Observation of explosive spectral behaviors in proton-enhanced high-Q inductors and their explanations

IEEE Transactions on Electron Devices

Volumn 50, Issue 3, 2003, Pages 758-763

  Liao, Chungpin ^a   Liu, Chih Wei ^b   Hsu, Yu Min ^a  

^a Advanced Research and Business Laboratory ARBL   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

High resistivity; High Q inductor; Proton beam; RF system on a chip (SOC)

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRONS; INDUCTANCE; PROTON BEAMS; SEMICONDUCTING SILICON; VLSI CIRCUITS;

MICROSTRIP INDUCTORS; SILICON SUBSTRATES; SYSTEM ON CHIP;

ELECTRIC INDUCTORS;

EID: 0038236450     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.810475     Document Type: Article

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