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Volumn 50, Issue 3, 2003, Pages 758-763

Observation of explosive spectral behaviors in proton-enhanced high-Q inductors and their explanations

Author keywords

High resistivity; High Q inductor; Proton beam; RF system on a chip (SOC)

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRONS; INDUCTANCE; PROTON BEAMS; SEMICONDUCTING SILICON; VLSI CIRCUITS;

EID: 0038236450     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.810475     Document Type: Article
Times cited : (8)

References (12)
  • 1
    • 26344461446 scopus 로고    scopus 로고
    • Creation of local semi-insulating regions on semiconductor substrates
    • U.S. Patent 6 046 109, Apr.
    • C. P. Liao et al., "Creation of Local Semi-Insulating Regions on Semiconductor Substrates," U.S. Patent 6 046 109, Apr. 2000.
    • (2000)
    • Liao, C.P.1
  • 2
    • 0038716084 scopus 로고    scopus 로고
    • Alternative structure to SOI using proton beams
    • U.S. Patent 6 214 750, Apr.
    • C. P. Liao "Alternative Structure to SOI Using Proton Beams," U.S. Patent 6 214 750, Apr. 2001.
    • (2001)
    • Liao, C.P.1
  • 3
    • 0032305654 scopus 로고    scopus 로고
    • Method of creating local semi-insulating regions on silicon wafers for device isolation and realization of high-Q inductors
    • Dec.
    • C. P. Liao et al., "Method of creating local semi-insulating regions on silicon wafers for device isolation and realization of high-Q inductors," IEEE Electron Device Lett., vol. 19, p. 461, Dec. 1998.
    • (1998) IEEE Electron Device Lett. , vol.199 , pp. 461
    • Liao, C.P.1
  • 4
    • 26344472864 scopus 로고    scopus 로고
    • Radiation-enhanced particle beams and related applications
    • U.S. Patent pending
    • C. P. Liao and T. T. Yang, "Radiation-enhanced particle beams and related applications," U.S. Patent pending.
    • Liao, C.P.1    Yang, T.T.2
  • 6
    • 0038037732 scopus 로고    scopus 로고
    • Cross-talk suppression in mixed-mode ICs by the π technology and the future with an SOC integration platform: Particle-beam stand (PBS)
    • Mar.
    • C. P. Liao, M.-N. Liu, and K.-C. Juang, "Cross-talk suppression in mixed-mode ICs by the π technology and the future with an SOC integration platform: Particle-beam stand (PBS)," IEEE Trans. Electron Devices, vol. 50, pp. 764-768, Mar. 2003.
    • (2003) IEEE Trans. Electron Devices , vol.50 , pp. 764-768
    • Liao, C.P.1    Liu, M.-N.2    Juang, K.-C.3
  • 7
    • 0035340555 scopus 로고    scopus 로고
    • Isolation on Si wafer by MeV proton bombardment for RF integrated circuits
    • May
    • L. S. Lee et al., "Isolation on Si wafer by MeV proton bombardment for RF integrated circuits," IEEE Trans. Electron Devices, vol. 48, pp. 928-934, May 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , pp. 928-934
    • Lee, L.S.1
  • 8
    • 26344443788 scopus 로고    scopus 로고
    • A physical model for planar sprial inductors on silicon
    • paper IEDM 96-155
    • C. P. Yue et al., "A physical model for planar sprial inductors on silicon," in IEDM Tech. Dig., 1996, paper IEDM 96-155, pp. 6.5.1-6.5.4.
    • (1996) IEDM Tech. Dig.
    • Yue, C.P.1
  • 9
    • 0032075292 scopus 로고    scopus 로고
    • On-chip spiral inductors with patterned ground shields for Si-based RF IC's
    • May
    • C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE J. Solid-State Circuits, vol. 33, p. 743, May 1998.
    • (1998) IEEE J. Solid-State Circuits , vol.33 , pp. 743
    • Yue, C.P.1    Wong, S.S.2
  • 12
    • 66749165259 scopus 로고    scopus 로고
    • [Online]
    • The Stopping and Range of Ions in Matter, a computer code constantly updated by J. F. Ziegler and J. P. Biersack, SRIM. [Online]. Available: http://www.srim.org/.
    • SRIM
    • Ziegler, J.F.1    Biersack, J.P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.