On-chip spiral inductors with diffused shields using channel-stop implant

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 540-543

  Yoshitomi, Takashi ^a   Sugawara, Yasuharu ^a   Morifuji, Eiji ^a   Ohguro, Tatsuya ^a   Kimijima, Hideki ^a   Morimoto, Toyota ^a   Momose, Hisayo Sasaki ^a   Katsumata, Yasuhiro ^a   Iwai, Hiroshi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIFFUSION IN SOLIDS; ION IMPLANTATION; MICROPROCESSOR CHIPS; Q FACTOR MEASUREMENT; SEMICONDUCTOR DEVICE STRUCTURES;

CHANNEL STOP IMPLANT; ON CHIP SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0032279427     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)