Epitaxial films for Ge-Sb-Te phase change memory

Journal of Crystal Growth

Volumn 311, Issue 7, 2009, Pages 2215-2219

  Shayduk, R ^a   Braun, W ^a  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

Author keywords

A1. Reflection high energy electron diffraction; A1. X ray diffraction; A3. Molecular beam epitaxy; B2. Chalcogenides; B3. Phase change memory

Indexed keywords

AMORPHOUS MATERIALS; CHALCOGENIDES; CRYSTAL GROWTH; ELECTRON DIFFRACTION; EPITAXIAL FILMS; EPITAXIAL LAYERS; GERMANIUM; LATTICE CONSTANTS; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; MOLECULAR DYNAMICS; REFLECTION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTOR QUANTUM WIRES; TELLURIUM COMPOUNDS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

A1. REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION; A1. X-RAY DIFFRACTION; A3. MOLECULAR BEAM EPITAXY; B2. CHALCOGENIDES; B3. PHASE CHANGE MEMORY;

PHASE CHANGE MEMORY;

EID: 63349110693     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.11.028     Document Type: Article

References (16)

1. Ovshinsky S.R. Phys. Rev. Lett. 21 (1968) 20
2. Ohta T. J. Optoelectron. Adv. Mater. 3 (2001) 609
3. T. Ohta, S.R. Ovshinsky, Wiley-VCH, Berlin, 2003, pp. 310-326.
4. IBM/Mactronics/Quimonda, International Electronic Devices Meeting, San Francisco, 2006.
5. Yamada N., and Matsunaga T. J. Appl. Phys. 88 (2000) 7020
6. Petrov I.I., Imamov R.M., and Pinsker Z.G. Sov. Phys. Crystallogr. 13 (1968) 339
7. Nonaka T., Ohbayashi G., Toriumi Y., Mori Y., and Hashimoto H. Thin Solid Films 370 (2000) 258
8. Kolobov A., and Fons P. Nat. Mater. 3 (2004)
9. Kim E.T., and Lee J.Y. Appl. Phys. Lett. 91 (2007) 101909
10. Park Y.J., and Lee. Appl. Surf. Sci. 252 (2006) 8102
11. Jenichen B., Braun W., Kaganer V.M., Shtukenberg A.G., Daweritz L., Shultz C.-G., and Ploog K.H. Rev. Sci. Instrum. 74 3 (2003) 1267
12. Nosho B.Z., Bennet B.R., Aifer E.H., and Goldenberg M. J. Crystal Growth 236 (2002) 155
13. Maeda F., Sugiyama M., and Watanabe Y. Phys. Rev. B 62 3 (2000) 1615
14. Braun W., Moller H., and Zhang Y.-H. J. Vac. Sci. Technol. B 16 (1998) 1507
15. Warren B.E. X-Ray Diffraction (1969), Addison-Wesley Publishing Co., Reading, MA p. 374
16. Lankhorst M.H.R., Ketelaars B.W.S.M.M., and Wolters R.A.M. Nat. Mater. 4 (2005)