Reflection high-energy electron diffraction during substrate rotation: A new dimension for in situ characterization

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1507-1510

  Braun, W ^a   Moller H ^b   Zhang, Y H ^a  

^a AZ 85281   (United States)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345498329     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589976     Document Type: Article

References (18)

1. G. W. Turner and A. J. Isles, J. Vac. Sci. Technol. B 10, 1784 (1992).
2. S. P. A. van der Wagt and J. S. Harris, Jr., J. Vac. Sci. Technol. B 12, 1236 (1994).
3. D. A. Collins, G. O. Papa, and T. C. McGill, J. Vac. Sci. Technol. B 13, 1953 (1995).
4. R. F. Kromann, R. N. Bicknell-Tassius, A. S. Brown, J. F. Dorsey, K. Lee, and G. May, J. Cryst. Growth 175/176, 334 (1997).
5. G. W. Turner, B. A. Nechay, and S. J. Eglash. J. Vac. Sci. Technol. B 8, 283 (1990).
6. J. J. Harris, B. A. Joyce, and P. J. Dobson, Surf. Sci. 103, L90 (1981).
7. W. Braun, A. Trampert, L. Däweritz, and K. H. Ploog, Phys. Rev. B 55, 1689 (1997).
8. S. Ino, Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, edited by P. K. Larsen and P. J. Dobson (Plenum, New York, 1988), p. 3.
9. Safire" by VTS Schwarz/FhG Erlangen.
10. A. Ichimiya, K. Kambe, and G. Lehmpfuhl, J. Phys. Soc. Jpn. 49, 684 (1980).
11. G. Meyer-Ehmsen, in Ref. 8. p. 99.
12. L.-M. Peng, J. Cowley, and N. Yao, Ultramicroscopy 26, 189 (1988).
13. M. Henzler, Appl. Surf. Sci. 11/12, 450 (1982).
14. W. Braun, O. Brandt, M. Wassermeier, L. Däweritz, and K. H. Ploog, Appl. Surf. Sci. 104/105, 35 (1996).
15. Y Horio and A. Ichimiya, Surf. Sci. 219, 128 (1993).
16. Y. Ma, S. Lordi, P. K. Larsen, and J. A. Eades, Surf. Sci. 289, 47 (1993).
17. J. M. McCoy, U. Korte, P. A. Maksym, and G. Meyer-Ehmsen, Surf. Sci. 306, 247 (1994).
18. Y. Ma, S. Lordi, P. K. Larsen, and J. A. Eades, Surf. Sci. 306, 252 (1994).