NEMS based on top-down technologies: From stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration

2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC

Volumn , Issue , 2008, Pages

  Ollier, E ^a   Andreucci, P ^a   Duraffourg, L ^a   Colinet, E ^a   Durand, C ^a,b,c   Casset, F ^a   Ernst, T ^a   Hentz, S ^a   Labarthe, S ^a   Marcoux, C ^a   Nguyen, V ^a   Renaud, D ^a   Mile, E ^a   Renaux, P ^a   Mercier, D ^a   Robert, P ^a   Ancey, P ^b   Bouchaillot, L ^c  

^a CEA GRENOBLE   (France)

^b STMICROELECTRONICS   (France)

^c INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATIONS; STAND -ALONE; TOP-DOWN TECHNOLOGIES;

SOLID STATE DEVICES;

EID: 63249124229     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDSSC.2008.4760714     Document Type: Conference Paper

References (22)

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