Study of kinetic behaviors of GeO in GeO2/Ge stacks

ECS Transactions

Volumn 16, Issue 5, 2009, Pages 187-194

  Kita, Koji ^a   Lee, Choong Hyun ^a   Nishimura, Tomonori ^a   Nagashio, Kosuke ^a   Toriumi, Akira ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; GATE DIELECTRICS; HIGH-K DIELECTRIC; SPECTROSCOPIC ELLIPSOMETRY;

DIFFUSION PROCESS; EXTINCTION COEFFICIENTS; GAP STATE; HIGH PRESSURE; KINETIC BEHAVIOR; NORMAL PRESSURE; PHOTOABSORPTIONS; SUB-BANDGAP;

GERMANIUM OXIDES;

EID: 63149181611     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2981601     Document Type: Conference Paper

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