Self-feeding microfluidic structures on silicon and glass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5839, Issue , 2005, Pages 323-331

  Kolari, Kai ^a   Hokkanen, Ari ^a   Stuns, Ingmar ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Capillary action; Deep plasma etching; Fused silica; Hydrophilicity; Silicon; Solid phase extraction

Indexed keywords

CAPILLARITY; CAPILLARY FLOW; CAVITATION; EXTRACTION; FUSED SILICA; GLASS; HYDROPHILICITY; OSMOSIS; PLASMA ETCHING; SILICON;

DEEP PLASMA ETCHING; LIQUID COMPOSITION; MICROFLUIDIC STRUCTURE; SOLID PHASE EXTRACTION;

FLUIDICS;

EID: 28344437082     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.609827     Document Type: Conference Paper

References (7)

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