The anodic bonding between K4 glass and Si

Materials Letters

Volumn 59, Issue 19-20, 2005, Pages 2492-2495

  Yu, P ^a   Pan, Ch ^b   Xue, J ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b CENTRAL IRON AND STEEL RESEARCH INSTITUTE   (China)

Author keywords

Anodic bonding; Field assisted bonding; Glass; Silicon

Indexed keywords

ANODES; BONDING; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FRACTURE; INTERFACES (MATERIALS); MICROSTRUCTURE; POTASSIUM; SILICON; THERMAL EFFECTS;

ANODIC BONDING; BONDING MECHANISMS; FIELD-ASSISTED BONDING; K4 GLASS;

GLASS;

EID: 20444468850     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2005.03.031     Document Type: Article

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