Optimization of multilayer mirrors at 13:4nm with more than two materials

Applied Optics

Volumn 47, Issue 12, 2008, Pages 2155-2160

  Al Marzoug, S M ^a   Hodgson, R J W ^a  

^a UNIVERSITY OF OTTAWA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

GLOBAL OPTIMIZATION; MIRRORS;

KEY TECHNOLOGIES; LUUS-JAAKOLA OPTIMIZATION PROCEDURE; MULTI-LAYER MIRRORS; NUMBER OF LAYERS; TWO-MATERIALS;

MULTILAYERS;

EID: 61849166011     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.002155     Document Type: Article

References (21)

1. S. Bajt, J. Alameda, T. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. Spiller, "Improved reflectance and stability of Mo/Si multilayers," Proc. SPIE 4506, 65-75 (2001).
2. S. P. Vernon, D. G. Stearns, and R. S. Rosen, "Ion-assisted sputter deposition of molybdenum-silicon multilayers," Appl. Opt. 32, 6969-6974 (1993).
3. J. Folta, S. Bajt, T. Barbee Jr., R. Grabner, P. Mirkarimi, T. Nguyen, M. Schmidt, E. Spiller, C. Walton, M. Wedowski, and C. Montcalm, "Advances in multilayer reflective coatings for extreme-ultraviolet lithography," Proc. SPIE 3676, 702-709 (1999).
4. K. M. Skulina, C. S. Alford, R. M. Bionta, D. M. Makowiecki, E. M. Gullikson, R. Soufli, J. B. Kortright, and J. H. Underwood, "Molybdenum/ beryllium multilayer mirrors for normal incidence in the extreme ultraviolet," Appl. Opt. 34, 3727-3730 (1995).
5. K. Powell, J. Tait, and A. Michette, "Simulated annealing in the design of broadband multilayers containing more than two materials," Proc. SPIE 4145, 254-256 (2001).
6. J. Larruquert, "Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials," J. Opt. Soc. Am. A 19, 391-397 (2002).
7. P. Binda and F. Zocchi, "Genetic algorithm optimization of xray multilayer coatings," Proc. SPIE 5536, 97-108 (2004).
8. V. Cotroneo and G. Pareschi, "Global optimization of x-ray multilayer mirrors with iterated simplex method," Proc. SPIE 5536, 49-60 (2004).
9. T. Boudet, P. Chaton, L. Herault, G. Gonon, L. Jouanet, and P. Keller, "Thin-film designs by simulated annealing," Appl. Opt. 35, 6219-6226 (1996).
10. J. Larruquert, "New layer-by-layer multilayer design method," J. Opt. Soc. Am. A 19, 385-390 (2002).
11. M. Singh and J. J. M. Braat, "Design of multilayer extremeultraviolet mirrors for enhanced reflectivity," Appl. Opt. 39, 2189-2197 (2000).
12. R. Luus and T. Jaakola, "Optimization by direct search and systematic reduction of the size of search region," AIChE. J. 19, 760-766 (1973).
13. R. Luus, "Use of Luus-Jaakola optimization procedure for singular optimal control problems," Nonlinear Anal. 47, 5647-5658 (2001).
14. R. Luus, "Optimization of heat exchanger networks," Ind. Eng. Chem. 32, 2633-2635 (1993).
15. Y. P. Lee, G. P. Rangahiah, and R. Luus, "Phase and chemical equilibrium calculations by direct search optimization," Comput. Chem. Eng. 23, 1183 (1999); http://www.ingentaconnect.com/content/els/00981354/ 1999/00000023/00000009/art00283.
16. S. Al-Marzoug and R. Hodgson, "Luus-Jaakola optimization procedure for multilayer optical coatings," Opt. Commun. 265, 234-240 (2006).
17. B. Liao and R. Luus, "Comparison of the Luus-Jaakola optimization procedure and the genetic algorithm," Eng. Optimiz. 37, 381-398 (2005).
18. R. Luus, "Determination of the region sizes for L.J optimization procedure," Hung. J. Ind. Chem. 26, 281-286 (1998).
19. Lawrence Livermore National Laboratory optical constants database, ftp://www-phys.llnl.gov/pub/rayleigh.
20. L. G. Parratt, "Surface studies of soilds by total reflecation of x-ray," Phys. Rev. 95, 359-369 (1954).
21. S. Yulin, T. Feigl, N. Benoit, and N. Kaiser, "EUV/soft x-ray multilayer optics," Proc. SPIE 5645, 289-298 (2005).