Genetic algorithm optimization of X-ray multilayer coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5536, Issue , 2004, Pages 97-108

  Binda, Pietro D ^a   Zocchi, Fabio E ^a  

^a Media Lario Technologies Srl   (Italy)

Author keywords

Genetic algorithm; Multilayer coating; Numerical optimisation; Reflectivity; X ray mirrors

Indexed keywords

COATINGS; GENETIC ALGORITHMS; LIGHT ABSORPTION; MIRRORS; MULTILAYERS; OPTIMIZATION; REFLECTION; THICKNESS MEASUREMENT;

MULTILAYER COATINGS; NUMERICAL OPTIMIZATION; WAVELENGTH RANGE; X-RAY MIRRORS;

X RAYS;

EID: 15844395331     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.568104     Document Type: Conference Paper

References (37)

1. J. Holland, Adaptation in Natural and Artificial Systems, University of Michigan Press, Ann Arbor, MI (1975).
2. D.E. Goldberg, Genetic Algorithms in Search Optimisation and Machine Learning, Addison-Wesley, Reading, MA (1989).
3. T. Eisenhammer, M. Lazarov, M. Leutbecher, U. Schöffel, and R. Sizmann, "Optimisation of interference filters with genetic algorithms applied to silver-based heat mirrors," Appl. Opt. 32, 6310-6315 (1993).
4. S. Martin, J. Rivory, and M. Schoenauer, "Simulated Darwinian evolution of homogeneous multilayer systems: a new method for optical coating design," Opt. Comm. 110, 503-506 (1994).
5. S. Martin, J. Rivory, and M. Schoenauer, "Synthesis of optical multilayer systems using genetic algorithms," Appl. Opt. 34, 2247-2254 (1995).
6. S. Lunt, R.S. Turley, and D.D. Allred, "Design of bifunctional XUV multilayer mirrors using a genetic algorithm," Journal of X-ray Science and Technology 9, 1-11 (2001).
7. M. Sanchez del Rio, G. Pareschi, and C. Michetschläger, "Modelling multilayer X-ray reflectivity using genetic algorithms," in Synchrotron Radiation Instrumentation, SRI99, Proc. AIP 521, 293-298 (2000).
8. D. Šimek, D. Rafaja, and J. Kub, "Genetic algorithms applied to multilayer structure determination," Materials Structure 8, 16-21(2001).
9. T.W. Barbee, "Multilayer for X-ray optics," Opt. Eng. 25, 898-915 (1986).
10. O.S. Heavens and H.M. Liddell, "Staggered broad-band reflecting multilayer," Appl. Opt. 5, 373-376 (1966).
11. K.D. Joensen, F.E. Christensen, H.W. Schnepper, P.Gorenstein, J. Susini, P. Høghøi, R. Hustache, J. Wood, and K. Parker, "Mediaum-sized grazing incidence high-energy X-ray telescopes employing continuously graded multilayers," in X-ray Detector Physics and Applications, Proc. Soc. Photo-Opt. Instrum. Eng. 1736, 239-248 (1992).
12. J.F. Meekins, R.G. Cruddace, and H. Gursky, "Optimisation of layered synthetic microstructures fro broadband reflectivity at soft X-ray and EUV wavelengths," Appl. Opt. 26, 990-994 (1987).
13. F.E. Christensen, A. Hornstrup, N.J. Westergaard, J. Schnepper, J. Wood, and K. Parker, "A graded d-spacing multilayer telescope for high-energy X-ray astronomy," in Multilayer and Grazing Incidence X-ray/EUV Optics, Proc. Soc. Photo-Opt. Instrum. Eng. 1546, 160-167 (1992).
14. L.G. Parrat, "Surface studies of solids by reflection of X-rays," Phys. Rev. 95(2), 359-369 (1954).
15. L. Nevot and P. Croce, "Caractérisation des surfaces par réflexion rasant de rayons X: application à l'étude du polissage de quelques verres silicates," Rev. Phys. Appl. 15, 113-125 (1976).
16. E. Spiller, Soft X-Ray Optics, SPIE Optical Engineering Press, Bellingham, WA (1994).
17. F. Abèles, "Recherche sur la propagation des ondes électromagnétique sinusoïdales dans les milieux stratifies," Annales de Physique 127, p. 597 (1950).
18. P. Mikulik, X-Ray reflectivity from planar and structured Multilayers, PhD thesis, Universitè Joseph Fourier, Grenoble, France (1997).
19. V.V. Aristov, A.I. Erko, and V.V. Martynov, "Dynamic X-ray diffraction by a multilayer mirror modulated with a transverse acoustic wave," X-ray Science and Technology 3, p. 211 (1992).
20. D.K.G. de Boer, "Influence of the roughness profile on the specular reflectivity of X-rays and neutrons," Phys. Rev. B49, 5817-5820 (1994).
21. P. Debye, "Uber die Intensitatsverteilung in den mit Rontgenstrahlung erzeugten Interferenzbildern," Verh. d. Deutsch. Phys. Ges. 15, p. 738 (1913).
22. I. Waller, "Zur Frage der Einwirkung der Warmebewegung auf die Interferenz von Rontgenstrahlen," Z Physik, 17, p. 398 (1923).
23. B.L. Henke, E.M. Gullikson, and J.C. Davis, "X-Ray Interactions: Photoabsorption, Scattering, Transmission and Reflection at E=50-30,000 eV, Z=1-92," Atomic Data and Nuclear Data Tables 54, p. 181 (1993); see also http://www-cxro.lbl.gov/optical-constants.
24. Lawrence Livermore National Laboratory optical constants database ftp://www-phys.llnl.gov/pub/rayleigh.
25. O. Citterio, G. Bonelli, G. Conti, E. Mattaini, E. Santambrogio, B. Sacco, E. Lanzara, H. Brauninger, and W. Burkert, "Optics for the X-ray imaging concentrators aboard the X-ray astronomy satellite SAX," Appl. Opt. 27, 1470-1475 (1988).
26. D. N. Burrows, J. E. Hill, J. A., Nousek, A. A. Wells, A. D. Short, R. Willingale, O. Citterio, G. Chincarini, and G. Tagliaferri, "Swift X-Ray Telescope," Proc. SPIE 4140, 64-75 (2000).
27. M.C. Weisskopf and S.L. O'Dell, "Calibration of the AXAF observatory: Overview," Proc. SPIE 3113, 2-17 (1997).
28. F. Jansen, D. Lumb, B. Altieri, J. Clavel, M. Ehle, C. Erd, C. Gabriel, M. Guainazzi, P. Gondoin, R. Much, R. Munoz, M. Santos, N. Schartel, D. Texier, and G. Vacanti., "XMM-Newton observatory - I. The spacecraft and operations," Astron. Astrophys. 365, L1-L6 (2001).
29. T.Okajima, Y.Ogasaka, K. Tamura, A. Furuzawa, Y. Tawara, K. Yamashita, and H. Kunieda, "Supermirror design for the XEUS X-ray telescope," Proc. SPIE 4851, 716-723 (2003).
30. G. Pareschi and V. Cotroneo, "Soft (0.1 - 10 keV) and hard (> 10 keV) X-ray multilayer mirrors for the XEUS astronomical mission," Proc. SPIE 5168, 53-64 (2004).
31. H. Tananbaum, N.B. White, K. Weaver, and R. Petre "Constellation X-ray mission: recent developments for mission concept and technology development," Proc. SPIE 5488, in press (2004).
32. M. Bavdaz and D.H. Lumb "XEUS mission reference design," Proc. SPIE 5488, in press (2004).
33. K.D. Joensen, P. Voutov, A. Szentgyorgyi, J. Roll, P. Gorenstein, P. Hoghoj, and F.E. Christensen, "Design of grazing-incidence multilayer supermirrors for hard X-ray reflectors," Appl. Opt. 34, 7935-7944 (1995).
34. K. Yamashita, H. Kuneida, Y. Tawara, K. Tamura, Y. Ogasaka, K. Haga, T. Okajima, Y. Hidaka, S. Ichimaru, S. TakaHashi, A. goto, H. Kito, Y. Tsusaka, K. Yokoyama, and S. Takeda, "New design concept of multilayer supermirrors for hard X-ray optics," Proc. SPIE 3766, 327-335 (1999).
35. L. Geppert, "Chip making's wet new world," IEEE Spectrum, May 2004, 21-25 (2004).
36. E. Spiller, "High performance multilayer coatings for EUV lithography" Proc. SPIE 5193, 89-97 (2003).
37. D.A. Tichenor, et al. "System integration and performance of the EUV Engineering Test Stand," Proc. SPIE 4343, 19-37 (2001).