메뉴 건너뛰기




Volumn 34, Issue 34, 1995, Pages 7914-7924

Determination of the optical constants and thickness of thin films on slightly absorbing substrates

Author keywords

Optical constants; Reflectance; Si; Thin films

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; OPTICAL CONSTANTS; OPTICAL PROPERTIES; REFLECTION; REFRACTIVE INDEX; SILICON; SUBSTRATES; THIN FILMS;

EID: 84906316541     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.34.007914     Document Type: Article
Times cited : (54)

References (19)
  • 1
    • 0020830645 scopus 로고
    • Determination of optical constants of thin-film coating material based on inverse synthesis
    • J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of optical constants of thin-film coating material based on inverse synthesis, " Appl. Opt. 22, 3191-3200 (1983).
    • (1983) Appl. Opt , vol.22 , pp. 3191-3200
    • Dobrowolski, J.A.1    Ho, F.C.2    Waldorf, A.3
  • 3
    • 0026261131 scopus 로고
    • Determination of optical parameters for amorphous thin-film materials on semitransparent substrates from transmittance and reflectance measurement
    • O. Stenzel, V. Hopfe, and P. Klobes, "Determination of optical parameters for amorphous thin-film materials on semitransparent substrates from transmittance and reflectance measurement, " J. Phys. D 24, 2088-2094 (1991).
    • (1991) J. Phys. D , vol.24 , pp. 2088-2094
    • Stenzel, O.1    Hopfe, V.2    Klobes, P.3
  • 4
    • 0025212767 scopus 로고
    • Heterojunction diodes formed using thin-film C containing polycrystalline diamond and Si
    • G. Amaratunga, W. Milne, and A. Putnis, "Heterojunction diodes formed using thin-film C containing polycrystalline diamond and Si, " IEEE Electron Device Lett. 11, 33-35 (1990).
    • (1990) IEEE Electron Device Lett , vol.11 , pp. 33-35
    • Amaratunga, G.1    Milne, W.2    Putnis, A.3
  • 5
  • 6
    • 0028413647 scopus 로고
    • The optical properties of band-gap-modulated diamond-like carbon thin films
    • Rusli, S. R. P. Silva, and G. Amaratunga, "The optical properties of band-gap-modulated diamond-like carbon thin films, " Diamond Related Mater. 3, 817-820 (1994).
    • (1994) Diamond Related Mater , vol.3 , pp. 817-820
    • Rusli, S.R.1    Silva, P.2    Amaratunga, G.3
  • 8
    • 0008841151 scopus 로고
    • Optical properties of diamondlike carbon films: An ellipsometric study
    • A. A. Khan, D. Mathine, and J. A. Woollam, "Optical properties of diamondlike carbon films: an ellipsometric study, " Phys. Rev. B 28, 7229-7235 (1983).
    • (1983) Phys. Rev. B , vol.28 , pp. 7229-7235
    • Khan, A.A.1    Mathine, D.2    Woollam, J.A.3
  • 9
    • 84975606797 scopus 로고
    • Determination of optical constants of thin film from reflectance spectra
    • G. Leveque andY. Villachon-Renard, "Determination of optical constants of thin film from reflectance spectra, " Appl. Opt. 29, 3207-3212 (1990).
    • (1990) Appl. Opt , vol.29 , pp. 3207-3212
    • Leveque, G.1    Villachon-Renard, Y.2
  • 11
    • 0027582773 scopus 로고
    • Determination of the optical constants of fine grained diamond layers on silicon substrates using curve fitting procedures
    • O. Stenzel, R. Petrich, S. Roth, B. Mainz, and W. Scharff, "Determination of the optical constants of fine grained diamond layers on silicon substrates using curve fitting procedures, " Diamond Related Mater. 2, 704-707 (1993).
    • (1993) Diamond Related Mater , vol.2 , pp. 704-707
    • Stenzel, O.1    Petrich, R.2    Roth, S.3    Mainz, B.4    Scharff, W.5
  • 12
    • 0017017243 scopus 로고
    • A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film
    • J. C. Manifacier, J. Gasiot, and J. P. Fillard, "A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film, " J. Phys. E. 9, 1002-1004 (1976).
    • (1976) J. Phys. E , vol.9 , pp. 1002-1004
    • Manifacier, J.C.1    Gasiot, J.2    Fillard, J.P.3
  • 13
    • 0020940620 scopus 로고
    • Determination of the thickness and optical constants of amorphous silicon
    • R. Swanepoel, "Determination of the thickness and optical constants of amorphous silicon, " J. Phys. E. 16, 1214-1222 (1983).
    • (1983) J. Phys. E , vol.16 , pp. 1214-1222
    • Swanepoel, R.1
  • 14
    • 0024715067 scopus 로고
    • Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum
    • D. A. Minkov, "Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum, " J. Phys. D 22, 1157-1161 (1989).
    • (1989) J. Phys. D , vol.22 , pp. 1157-1161
    • Minkov, D.A.1
  • 15
    • 0000414636 scopus 로고
    • Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation
    • I. An, H. V. Nguyen, A. R. Heyd, and R. W. Collins, "Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation, " Rev. Sci. Instrum. 65, 3489-3500 (1994).
    • (1994) Rev. Sci. Instrum , vol.65 , pp. 3489-3500
    • An, I.1    Nguyen, H.V.2    Heyd, A.R.3    Collins, R.W.4
  • 17
    • 0009260463 scopus 로고
    • Optical dispersion relations for amorphous semiconductors and amorphous dielectrics
    • A. R. Forouhi and I. Bloomer, "Optical dispersion relations for amorphous semiconductors and amorphous dielectrics, " Phys. Rev. B 34, 7018-7026 (1986).
    • (1986) Phys. Rev. B , vol.34 , pp. 7018-7026
    • Forouhi, A.R.1    Bloomer, I.2
  • 19
    • 84990679357 scopus 로고
    • A new method for the determination of the optical constants of thin films
    • L. Stichauer and G. Gavoille, "A new method for the determination of the optical constants of thin films, " Phys. Status SolidiA133, 547-553 (1992).
    • (1992) Phys. Status Solidi , vol.A133 , pp. 547-553
    • Stichauer, L.1    Gavoille, G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.