Determination of thicknesses and spectral dependences of refractive indices of non-absorbing and weakly absorbing thin films using the wavelengths related to extrema in spectral reflectances

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 285-289

  Ohlidal I ^a,b   Franta, D ^a,b   Ohlidal M ^b   Navratil K ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Optical parameters; Spectral reflectance; Thin films

Indexed keywords

ELLIPSOMETRY; LIGHT ABSORPTION; LIGHT REFLECTION; PHOTORESISTS; REFRACTIVE INDEX; SILICA; SILICON; SINGLE CRYSTALS; THIN FILMS;

SPECTROSCOPIC ELLIPSOMETRY; SPECTROSCOPIC REFLECTOMETRY;

OPTICAL FILMS;

EID: 0035858567     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00132-4     Document Type: Conference Paper

References (4)

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3. Swanepoel R. J Opt Soc Am A 1985;2:1339-43.
4. Ohlídal I, Franta D, Pinčik E, Ohlídal M. Surf Interface Anal 1999;28:240-4.