SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 517, Issue 10, 2009, Pages 3081-3086

Lithographic patterning of metals on flexible plastic foils

(5) Péter, Mária a Furthner, François a Deen, Jochem a de Laat, Wim J M b Meinders, Erwin R a

a HOLST CENTRE (Netherlands)

b ASML (Netherlands)

Author keywords

Biochip; Metal adhesion; PEN foils; Photolithography on flexible substrates

Indexed keywords

ADHESION; BIOASSAY; BIOCHIPS; ELECTRODES; METALS; ORGANIC SOLVENTS; PHOTOLITHOGRAPHY; PLASMA APPLICATIONS; THICKNESS MEASUREMENT;

ADHESION LAYERS; BIOCHIP; DIRECT-PATTERNING; ELECTRODE GAPS; ELECTRODE STRUCTURES; FILM QUALITIES; FLEXIBLE PLASTICS; LIFT-OFF PROCESS; LITHOGRAPHIC PATTERNING; METAL ADHESION; METAL ELECTRODES; METAL FILMS; OPTICAL LITHOGRAPHIES; PATTERNING ELECTRODES; PEN FOILS; PLASMA TREATMENTS; POLYETHYLENE NAPHTHALATE; PROCESS CONDITIONS; QUANTITATIVE MEASUREMENTS; SUB MICROMETERS; SUB MICRONS;

METAL FOIL;

EID: 61449190653 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2008.11.096 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.