Visually testing the dynamic character of a blazed-angle adjustable grating by digital holographic microscopy

Applied Optics

Volumn 48, Issue 5, 2009, Pages 919-923

  Qin, Chuan ^a   Zhao, Jianlin ^a   Di, Jianglei ^a   Wang, Le ^a   Yu, Yiting ^a   Yuan, Weizheng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHY; MICROSCOPIC EXAMINATION; PERIODIC STRUCTURES; PHASE MEASUREMENT; TESTING;

BLAZED ANGLE; DEFORMATION STATE; DIGITAL HOLOGRAPHIC MICROSCOPY; DRIVE VOLTAGE; DYNAMIC CHARACTER; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROCANTILEVER BEAMS; TESTING METHOD;

HOLOGRAMS;

EID: 61449114942     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.000919     Document Type: Article

References (18)

1. L. Hornbeck, "Spatial light modulator and method," U.S. patent 4,662,746 (5 May 1987).
2. E. Novak, "MEMS metrology techniques," Proc. SPIE 5716, 173-181(2005).
3. K. C. Maitland, H. J. Shin, H. Ra, D. Lee, O. Solgaard, and R. Richards-Kortum, "Single fiber confocal microscope with a two-axis gimbaled MEMS scanner for cellular imaging," Opt. Express 14, 8604-8612 (2006).
4. Z. Li, K. Herrmann, and F. Pohlenz, "Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices," Opt. Lett. 32, 1743-1745 (2007).
5. H. J. Tiziani, R. Achi, R. N. Kramer, and L. Wiegers, "Theoretical analysis of confocal microscopy with microlenses," Appl. Opt. 35, 120-125 (1996).
6. M. Roy, C. J. R. Sheppard, G. Cox, and P. Hariharan, "White-light interference microscopy: a way to obtain high lateral resolution over an extended range of heights," Opt. Express 14, 6788-6793 (2006).
7. J. Schmit and A. Olszak, "High-precision shape measurement by white-light interferometry with real-time scanner error correction," Appl. Opt. 41, 5943-5950 (2002).
8. P. Pavlicek and J. Soubusta, "Theoretical measurement uncertainty of white-light interferometry on rough surfaces," Appl. Opt. 42, 1809-1813 (2003).
9. G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, "A digital holographic microscope for complete characterization of microelectromechanical systems," Meas. Sci. Technol. 15, 529-539 (2004).
10. P. Ferraro, S. De Nicola, G. Coppola, A. Finizio, M. Iodice, C. Magro, and G. Pierattini, "Testing silicon MEMS structures subjected to thermal loading by digital holography," Proc. SPIE 5343, 235-243 (2004).
11. V. Ostasevicius, A. Palevicius, A. Daugela, M. Ragulskis, and R. Palevicius, "Holographic imaging technique for characterization of MEMS switch dynamics," Proc. SPIE 5389, 73-84 (2004).
12. L. Xu, X. Y. Peng, J. M. Miao, and A. K. Asundi, "Studies of digital microscopic holography with applications to microstructure testing," Appl. Opt. 40, 5046-5051 (2001).
13. J. L. Zhao, P. Zhang, J. B. Zhou, D. X. Yang, D. S. Yang, and E. P. Li," Visualizations of light-induced refractive index changes in photorefractive crystals employing digital holography," Chin. Phys. Lett. 20, 1748-1751 (2003).
14. J. Strand and T. Taxt, "Performance evaluation of two-dimensional phase unwrapping algorithms," Appl. Opt. 38, 4333-4344 (1999).
15. G. Coppola, V. Striano, P. Ferraro, S. De Nicola, A. Finizio, G. Pierattini, and P. Maccagnani, "A nondestructive dynamic characterization of a microheater through digital holography microscopy," J. Microelectromech. Syst. 16, 659-667 (2007).
16. G. Fornaro, G. Franceschetti, R. Lanari, E. Sansosti, and M. Tesauro, "Global and local phase-unwrapping techniques: a comparison," J. Opt. Soc. Am. A 14, 2702-2708 (1997).
17. U. Schnars and W. P. O. Juptner, "Digital recording and numerical reconstruction of holograms," Meas. Sci. Technol. 13, R85 (2002).
18. T. Kreis, Handbook of Holographic Interferometry (Wiley-VCH, 2005), pp. 23-24, 29-30, 115-117.