Theoretical measurement uncertainty of white-light interferometry on rough surfaces

Applied Optics

Volumn 42, Issue 10, 2003, Pages 1809-1813

  Pavliček, Pavel ^a   Soubusta, Jan ^a  

^a PALACKÝ UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT INTERFERENCE; OPTICAL CORRELATION; PROFILOMETRY; SPECKLE; SPECTRUM ANALYSIS; SURFACE ROUGHNESS;

WAVE SUPERPOSITIONS;

IMAGING SYSTEMS;

EID: 0042476624     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.001809     Document Type: Article

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