Stoichiometry distribution of thin films deposited by laser ablation: Monte Carlo simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 180, Issue 1-4, 2001, Pages 112-116

  Itina, Tatiana E ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Deposition; Laser ablation; Monte Carlo simulation; Stoichiometry; Thin films

Indexed keywords

ABSORPTION; COMPUTER SIMULATION; LASER ABLATION; MONTE CARLO METHODS; PULSED LASER DEPOSITION; STOICHIOMETRY; SUBSTRATES; THERMAL EXPANSION; THERMAL PLUMES; THIN FILMS;

BI-COMPONENT LASER PLUMES;

OPTICAL FILMS;

EID: 0035362520     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00404-9     Document Type: Conference Paper

References (8)