Surface quality of {111} side-walls in KOH-etched cavities

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 244-248

  Merveille, Chris ^a  

^a Melexis NV   (Belgium)

Author keywords

Potassium hydroxide; Side walls; Silicon pressure sensors; Surface quality

Indexed keywords

ETCHING; POTASSIUM COMPOUNDS; STRESSES; SURFACES;

ANISOTROPIC WET ETCHING; POTASSIUM HYDROXIDE; SILICON PRESSURE SENSORS; SURFACE QUALITY;

SILICON SENSORS;

EID: 0031144259     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01495-7     Document Type: Article

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