Characteristics of Cu-Zr thin film metallic glasses fabricated using a carousel-type sputtering system

Japanese Journal of Applied Physics

Volumn 48, Issue 2, 2009, Pages

  Sakurai, Junpei ^a   Hata, Seiichi ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; FABRICATION; GLASS; GLASS TRANSITION; LIQUID METALS; METALLIC GLASS; THERMODYNAMIC PROPERTIES; THIN FILM DEVICES; THIN FILMS; ZIRCONIUM;

ALLOY COMPOSITIONS; ATOMIC DIAMETERS; RADIO-FREQUENCY POWER; SPUTTER RATES; SPUTTERING SYSTEMS; SYNTHESIZE SAMPLES; THERMAL PROPERTIES; THIN FILM METALLIC GLASS;

COPPER;

EID: 60849135126     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.025503     Document Type: Article

References (21)

1. S. Hata, J. Sakurai, and A. Shimokohbe: Tech. Dig. 18th IEEE Int. Conf. MEMS 2005. p. 479.
2. T. Fukushige, Y. Yokoyama, S. Hata, K. Masu, and A. Shimokohbe: Microelectron. Eng. 67-68 (2003) 582.
3. T. Fukushige, S. Hata, and A. Shimokohbe: J. Microelectromech. Syst. 14 (2005) 243.
4. Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, and A. Shimokohbe: Jpn. J. Appl. Phys. 42 (2003) 2190.
5. Y. Liu, S. Hata, K. Wada, and A. Shimokohbe: Jpn. J. Appl. Phys. 40 (2001) 5382.
6. E. W. Becker, W. Ehrfeld, A. Maner, and D. Muchemeyer: Micro-electron. Eng. 4 (1986) 35.
7. P. W. Green, R. R. A. Syms, and E. M. Yeatman: J. Microelectromech. Syst. 4 (1995) 170.
8. A. Inoue, W. Zhang, T. Zhang, and K. Kurosawa: Acta Mater. 49 (2001) 2645.
9. A. Inoue, W. Zhang, T. Zhang, and K. Kurosawa: J. Non-Cryst. Solids 304 (2002) 200.
10. S. Miyazaki and A. Ishida: Mater. Sci. Eng. A 273-275 (1999) 106.
11. J. Sakurai, H. Hosoda, S. Kajiwara, and S. Miyazaki: Trans. Mater. Res. Soc. Jpn. 25 (2000) 801.
12. E. Kusano, A. Sato, N. Kikuchi, H. Nanto, and A. Kinbara: Surf. Coat. Technol. 120-121 (1999) 378.
13. T. Sawaguchi, M. Sato, and A. Ishida: Mater. Sci. Eng. A 332 (2002)
14. Metal Data Book, ed. Japan Institute of Metals (Maruzen, Tokyo, 2004) p. 12 [in Japanese].
15. A. Inoue and A. Takeuchi: Mater. Trans., JIM 43 (2002) 1892.
16. A. Inoue: Acta Mater. 48 (2000) 279.
17. W. H. Wang, C. Dong, and C. H. Shek: Mater. Sci. Eng. R 44 (2004)
18. B. M. Clemens: Phys. Rev. B 33 (1986) 7615.
19. T. P. Weihs, T. W. Barbee, Jr., and M. A. Wall: Acta Mater. 45 (1997) 2307.
20. R. B. Schwarz and W. L. Johnson: Phys. Rev. Lett. 51 (1983) 415.
21. R. Yamauchi, S. Hata, J. Sakurai, and A. Shimokohbe: Jpn. J. Appl. Phys. 45 (2006) 5911.