Thin film metallic glasses as new MEMS materials

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 479-482

  Hata, Seiichi ^a   Sakurai, Junpei ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC LIMIT; MICROFORMING; SUPERCOOLED LIQUID REGION (SCLR); THIN FILM METALLIC GLASSES (TFMG);

DEFORMATION; ELASTICITY; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; THIN FILMS; VISCOSITY;

METALLIC GLASS;

EID: 26844505137     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1453971     Document Type: Conference Paper

References (11)

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