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Volumn 11, Issue , 2009, Pages
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Charge dependence of nano-particle growth in silane plasmas under UV irradiation
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Author keywords
[No Author keywords available]
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Indexed keywords
COAGULATION;
CONTROL SYSTEM ANALYSIS;
IRRADIATION;
NANOPARTICLES;
SILANES;
CHARGE DEPENDENCES;
CHARGE REDUCTIONS;
CONTROL PARAMETERS;
NANO STRUCTURES;
PARTICLE CHARGES;
PARTICLE COAGULATIONS;
PARTICLE GROWTHS;
PROCESSING PLASMAS;
SILANE PLASMAS;
TIME DEPENDENTS;
UV IRRADIATIONS;
PLASMAS;
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EID: 60849092568
PISSN: 13672630
EISSN: None
Source Type: Journal
DOI: 10.1088/1367-2630/11/1/013015 Document Type: Article |
Times cited : (3)
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References (15)
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