Controlled particle generation in an inductively coupled plasma

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Schulze, M ^a   Von Keudell, A ^a   Awakowicz, P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC DISCHARGES; INDUCTIVELY COUPLED PLASMA; OSCILLATIONS; PLASMA THEORY; SCANNING ELECTRON MICROSCOPY;

ARGON/HELIUM DISCHARGE; EMISSION INTENSITY; PLASMA PRODUCED PARTICLES; SCANNING ELECTRON MICROGRAPHS;

ELEMENTARY PARTICLES;

EID: 33646706122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2193041     Document Type: Article

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