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Volumn , Issue , 2008, Pages 2341-2349

Toward on-demand wafer fab simulation using formal structure and behavior models

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS MODELS; BEHAVIOR MODELS; CAPITAL-INTENSIVE INDUSTRIES; DESCRIPTIVE MODELS; DESIGN TEAMS; FACTORY DESIGNS; GLOBAL BUSINESS; MULTI-DISCIPLINARY TEAMS; ON DEMANDS; SEMICONDUCTOR MANUFACTURING; STAND -ALONE; STANDARD SOURCES; WAFER FAB;

EID: 60749120574     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2008.4736340     Document Type: Conference Paper
Times cited : (12)

References (13)
  • 1
    • 0032138964 scopus 로고    scopus 로고
    • Modeling and Simulation of an Electronic Component Manufacturing System Using Hybrid Petri Nets
    • Allam, M., and H. Alla. 1998. Modeling and Simulation of an Electronic Component Manufacturing System Using Hybrid Petri Nets. IEEE Transactions on Semiconductor Manufacturing 11(3).
    • (1998) IEEE Transactions on Semiconductor Manufacturing , vol.11 , Issue.3
    • Allam, M.1    Alla, H.2
  • 3
    • 0013040685 scopus 로고
    • Arjuna Team, Department of Computing Science, University of Newcastle upon Tyne
    • Arjuna Team 1994. C++SIM User's Guide. Department of Computing Science, University of Newcastle upon Tyne .
    • (1994) C++SIM User's Guide
  • 6
    • 0035485518 scopus 로고    scopus 로고
    • Queuing network models in the design and analysis of semiconductor wafer Fabs
    • Kumar, S., and P. R. Kumar. 2001. Queuing network models in the design and analysis of semiconductor wafer Fabs. IEEE Transactions on Robotics and Automation 17(5).
    • (2001) IEEE Transactions on Robotics and Automation , vol.17 , Issue.5
    • Kumar, S.1    Kumar, P.R.2
  • 11
    • 0003777608 scopus 로고    scopus 로고
    • Formal approaches to systems analysis using UML: An overview
    • Whittle, J. 2000. Formal approaches to systems analysis using UML: an overview. Journal of Database Management 11(4).
    • (2000) Journal of Database Management , vol.11 , Issue.4
    • Whittle, J.1
  • 12
    • 0033161827 scopus 로고    scopus 로고
    • Semiconductor fabrication facility design using a hybrid search methodology
    • Yang, T., M. Rajasekharan, and B. A. Peters. 1999. Semiconductor fabrication facility design using a hybrid search methodology. Computers & Industrial Engineering 36:565-583.
    • (1999) Computers & Industrial Engineering , vol.36 , pp. 565-583
    • Yang, T.1    Rajasekharan, M.2    Peters, B.A.3
  • 13
    • 0032141060 scopus 로고    scopus 로고
    • Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri Net approach
    • Zhou, M., and M. D. Jeng. 1998. Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: a Petri Net approach. IEEE Transactions on Semiconductor Manufacturing 11(3).
    • (1998) IEEE Transactions on Semiconductor Manufacturing , vol.11 , Issue.3
    • Zhou, M.1    Jeng, M.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.