SysML-based simulation framework for semiconductor manufacturing

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 1075-1080

  Kwon, Kysang ^a   McGinnis, Leon F ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION LANGUAGES; DECISION MAKING; INFORMATION USE; MATHEMATICAL MODELS; PRODUCTION ENGINEERING; RISK MANAGEMENT;

ENGINEERING TOOLS; SIMULATION MODELS; SYSTEMS MODELING LANGUAGE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 44449132764     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341777     Document Type: Conference Paper

References (14)

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