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Volumn , Issue , 2008, Pages 1252-1255

Interface engineering for high-k/Ge gate stack

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED CMOS DEVICES; GATE STACKS; HIGH-K GATE STACK FORMATIONS; INTERFACE ENGINEERING TECHNIQUES; INTERFACE ENGINEERINGS; INTERFACE QUALITIES; SURFACE PASSIVATIONS;

EID: 60649108278     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2008.4734778     Document Type: Conference Paper
Times cited : (3)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.