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Volumn , Issue , 2008, Pages 1252-1255
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Interface engineering for high-k/Ge gate stack
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Author keywords
[No Author keywords available]
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Indexed keywords
ADVANCED CMOS DEVICES;
GATE STACKS;
HIGH-K GATE STACK FORMATIONS;
INTERFACE ENGINEERING TECHNIQUES;
INTERFACE ENGINEERINGS;
INTERFACE QUALITIES;
SURFACE PASSIVATIONS;
GATE DIELECTRICS;
GATES (TRANSISTOR);
GERMANIUM;
INTEGRATED CIRCUITS;
PASSIVATION;
LOGIC GATES;
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EID: 60649108278
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICSICT.2008.4734778 Document Type: Conference Paper |
Times cited : (3)
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References (12)
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