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Volumn 12, Issue 4, 2009, Pages

Rapid thermal annealing of sputtered silicon-rich oxide/SiO2 superlattice structure

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; FREQUENCY BANDS; LIGHT EMISSION; LUMINESCENCE; NANOCRYSTALLINE ALLOYS; NANOCRYSTALS; OXYGEN; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SILICON COMPOUNDS; SUPERLATTICES;

EID: 60449114012     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3074295     Document Type: Article
Times cited : (18)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.