Manufacture of an integrated three-dimensional structure nozzle plate using microinjection molding for a 1200-dpi inkjet printhead

Journal of Microelectromechanical Systems

Volumn 18, Issue 1, 2009, Pages 52-63

  Shen, Sheng Chih ^a   Wang, Min Wen ^b   Lee, Chung Jui ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Excimer laser; Lithographie Galvanoformung Abformung (LIGA); microelectroforming; Microelectromechanical systems; Microinjection molding; Nozzle plate

Indexed keywords

ASPECT RATIO; COMMINUTION; COMPETITION; COMPOSITE MICROMECHANICS; CONTROL SYSTEMS; ELECTROFORMING; ELECTROMECHANICAL DEVICES; EXCIMER LASERS; FABRICATION; GAS LASERS; INK; LASERS; MANUFACTURE; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROMECHANICS; MOLDING; NOZZLES; OSCILLATORS (ELECTRONIC); PHOTORESISTS; THERMAL PRINTING; THREE DIMENSIONAL;

EXCIMER LASER; LITHOGRAPHIE GALVANOFORMUNG ABFORMUNG (LIGA); MICROELECTROFORMING; MICROELECTROMECHANICAL SYSTEMS; MICROINJECTION MOLDING; NOZZLE PLATE;

PLATES (STRUCTURAL COMPONENTS);

EID: 60449107681     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2009847     Document Type: Article

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