Fabrication of an integrated piezo-electric micro-nebulizer for biochemical sample analysis

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 659-669

  Pan, C T ^a   Shiea, J ^b   Shen, S C ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMISTRY; DROP FORMATION; ELECTRIC POWER UTILIZATION; MASS SPECTROMETRY; MEMS; NOZZLES;

BIOCHEMICAL SAMPLE ANALYSIS; DROPLET PARTICLES; METHYL-ALCOHOL SOLVENTS; MICRO-NOZZLE PLATES;

PIEZOELECTRIC ACTUATORS;

EID: 34249059677     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/031     Document Type: Article

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