Micro-fabrication techniques applied to aluminosilicate glass surfaces: Micro-indentation and wet etching process

Thin Solid Films

Volumn 517, Issue 9, 2009, Pages 2900-2904

  Saito, Yasuhiro ^a   Okamoto, Shinya ^a   Inomata, Hiroyuki ^a   Kurachi, Junji ^a   Hidaka, Takeshi ^b   Kasai, Hiroaki ^b  

^a NIPPON SHEET GLASS CO LTD   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Depth profiling; Etching; Glass; Surface structure

Indexed keywords

ALUMINOSILICATES; DEPTH PROFILING; ETCHING; FABRICATION; GLASS; LEACHING; PH EFFECTS; SILICON COMPOUNDS; SURFACE STRUCTURE;

ALUMINOSILICATE GLASS; ETCHING CONDITIONS; ETCHING PARAMETERS; ETCHING RATES; GLASS SURFACES; HF ACIDS; HF ETCHINGS; KEY FACTORS; LEACHING MECHANISMS; MICRO INDENTATIONS; MICRO-FABRICATION TECHNIQUES; WET-ETCHING PROCESS;

WET ETCHING;

EID: 60249097246     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.11.077     Document Type: Article

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