Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Applied Surface Science

Volumn 254, Issue 22, 2008, Pages 7243-7249

  Saito, Yasuhiro ^a   Okamoto, Shinya ^a   Miki, Atsushi ^a   Inomata, Hiroyuki ^a   Hidaka, Takeshi ^b   Kasai, Hiroaki ^b  

^a NIPPON SHEET GLASS CO LTD   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

Etching; Glass; Micro fabrication; Patterning

Indexed keywords

ETCHING; FABRICATION; GLASS; MICROSTRUCTURE;

ABRASIVE BLASTS; ETCHING DEPTH; GLASS SURFACES; INDENTATION METHOD; MICRO INDENTATION; MICRO-FABRICATION TECHNOLOGY; NUMERICAL CONTROL; PATTERNING;

WET ETCHING;

EID: 50549101365     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.320     Document Type: Article

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