On accuracy and performance of high-order finite volume methods in local mean energy model of non-thermal plasmas

Journal of Computational Physics

Volumn 228, Issue 7, 2009, Pages 2468-2479

  Davoudabadi, M ^a   Shrimpton, J S ^b   Mashayek, F ^a  

^a University of Illinois at Chicago   (United States)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Finite volume method; High order simulations; Non equilibrium plasma; Plasma discharge model

Indexed keywords

COMPUTATIONAL EFFICIENCY; ELECTRIC DISCHARGES; NUMERICAL METHODS;

DISCHARGE MODELS; FINITE-VOLUME METHOD; HIGH-ORDER; HIGHER ORDER SIMULATIONS; HIGHER-ORDER; NONEQUILIBRIUM PLASMAS; PERFORMANCE; PLASMA DISCHARGE; PLASMA DISCHARGE MODEL; SECOND ORDERS;

FINITE VOLUME METHOD;

EID: 60149085420     PISSN: 00219991     EISSN: 10902716     Source Type: Journal    
DOI: 10.1016/j.jcp.2008.12.015     Document Type: Article

References (50)

1. Lieberman M.A., and Litchenberg A.J. Principles of Plasma Discharges and Materials Processing. first ed. (1994), Wiley-Interscience, New York
2. Cao J., and Matsoukas T. Deposition kinetics on particles in a dusty plasma reactor. J. Appl. Phys. 92 5 (2002) 2916-2922
3. Gogolides E., and Sawin H.H. Continuum modeling of radio-frequency glow discharges. I. theory and results for electropositive and electronegative gases. J. Appl. Phys. 72 9 (1992) 3971-3987
4. Graves D.B. Fluid model simulations of a 13.56 MHz rf discharge: Time and space dependence of rates of electron impact excitation. J. Appl. Phys. 62 1 (1987) 88-94
5. Park S.K., and Economou D.J. Analysis of low-pressure rf glow discharges using a continuum model. J. Appl. Phys. 68 8 (1990) 3904-3915
6. Park S.K., and Economou D.J. Parametric study of a radio-frequency glow discharge using a continuum model. J. Appl. Phys. 68 9 (1990) 4888-4890
7. Oh Y.H., Choi N.H., and Choi D.I. A numerical simulation of rf glow discharge containing an electronegative gas composition. J. Appl. Phys. 67 7 (1990) 1-12
8. Paranjpe A.P., McVittie J.P., and Self S.A. Algorithms for numerical simulation of radio-frequency glow discharges. Phys. Review A 41 12 (1990) 6949-6962
9. Gogolides E., and Sawin H.H. Continuum modeling of radio-frequency glow discharges. II. parametric study and sensitivity analysis. J. Appl. Phys. 72 9 (1992) 3988-4001
10. Gogolides E., Sawin H.H., and Brown R.A. Direct calculation of time-periodic states of continuum models of radio-frequency plasmas. Chem. Eng. Sci. 47 15 (1992) 3839-3855
11. Lymberopolous D.P., and Economou D.J. Fluid simulations of glow discharges: Effect of metastable atoms in argon. J. Appl. Phys. 73 8 (1993) 4888-4890
12. Passchier J.D.P., and Goedheer W.J. A two-dimensional fluid model for an argon rf discharge. J. Appl. Phys. 74 6 (1993) 3744-3751
13. Dalvie M., Suremdra M., and Selwyn G.S. Self-consistent fluid modeling of radio-frequency discharges in two dimensions. Appl. Phys. Lett. 62 24 (1993) 3207-3209
14. Wilcoxson M.H., and Manousiouthakis V.I. Well-posedness of continuum models for weakly ionized plasmas. IEEE Trans. Plasma Sci. 21 2 (1993) 213-222
15. Nitschke T.E., and Graves D.B. A comparison of particle in cell and fluid simulations of low-pressure radio-frequency discharges. J. Appl. Phys. 76 10 (1994) 5646-5660
16. Boeuf J.P., and Pitchford L.C. Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the gaseous electronics conference reference reactor. Phys. Rev. E 51 2 (1995) 1376-1390
17. 2 compared to experiments. J. Appl. Phys. 82 5 (1997) 2060-2071
18. Hagelaar G.J.M., and Kroesen G.M.W. Speeding up fluid models for gas discharges by implicit treatment of the electron energy source term. J. Comput. Phys. 159 1 (2000) 1-12
19. Lin Y.H., and Adomaitis R.A. Simulation and model reduction methods for an rf plasma glow discharge. J. Comput. Phys. 171 2 (2001) 731-752
20. Salabas G., Gousset G., and Alves L.L. Two-dimensional fluid modelling of charged particle transport in radio-frequency capacitively coupled discharges. Plasma Sources Sci. Technol. 11 (2002) 448-465
21. Herrebout D., Bogaerts A., Yan M., Gijbels R., Goedheer W., and Dekempeneer E. One-dimensional fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers. J. Appl. Phys. 90 2 (2001) 570-579
22. Yarin A.L., Rovagnati B., Mashayek F., and Matsoukas T. A reaction model for plasma coating of nanoparticles by amorphous carbon layers. J. Appl. Phys. 99 6 (2006) 064310-1-064310-12
23. Lowke J.J., and Davies K. Properties of electric discharges sustained by a uniform source of ionization. J. Appl. Phys. 48 12 (1977) 4991-5000
24. Boeuf J.P. Numerical model of rf glow discharges. Phys. Rev. E 36 6 (1987) 2782-2792
25. Boeuf J.P. A two-dimensional model of dc glow discharges. J. Appl. Phys. 63 5 (1988) 1342-1349
26. Barnes M.S., Colter T.J., and Elta M.E. Large-signal time-domain modeling of low-pressure rf glow discharges. J. Appl. Phys. 61 1 (1987) 81-89
27. Dhali S.K., and Williams P.F. Two-dimensional studies of streamers in gases. J. Appl. Phys. 62 12 (1987) 4696-4707
28. Surzhikov S.T., and Raizer Y.P. Two-dimensional structure in a normal glow discharge and diffusion effects in cathode and anode spot formation. High Temp. 26 3 (1988) 304-310
29. Spyrou N., and Manassis C. Spatio-temporal evolution of a transversally excited electrical discharge in Nitrogen. J. Phys. II France 1 (1991) 1021-1031
30. 2 radio-frequency discharges for a-Si:H deposition. Plasma Sources Sci. Technol. 7 3 (1998) 348-358
31. Shi J., and Kong M.G. Cathode fall characteristics in a dc atmospheric pressure glow discharge. J. Appl. Phys. 94 9 (2003) 5504-5513
32. Roy S., and Gaitonde D. Radio-frequency induced ionized collisional flow model for application at atmospheric pressures. J. Appl. Phys. 96 5 (2004) 2476-2481
33. Roy S., Pandey B.P., Poggie J., and Gaitonde D.V. Modeling low-pressure collisional plasma sheath with space-charge effect. Phys. Plasmas 10 6 (2003) 2578-2585
34. Callebaut T., Kochetov I., Akishev Y., Napartovich A., and Leys C. Numerical simulation and experimental study of the corona and glow regime of a negative pin-to-plate discharge in flowing ambient air. Plasma Sources Sci. Technol. 13 2 (2004) 245-250
35. Surzhikov S.T., and Shang J.S. Two-component plasma model for two-dimensional glow discharge in magnetic field. J. Comp. Phys. 199 2 (2004) 437-464
36. Davoudabadi M., and Mashayek F. Dust particle dynamics in low-pressure plasma reactor. J. Appl. Phys. 100 8 (2006) 083302-1-083302-10
37. Davoudabadi M., and Mashayek F. Numerical modeling of dust particles configurations in a cylindrical radio-frequency plasma reactor. Phys. Rev. E 76 5 (2007) 056405-1-056405-12
38. Ward A.L. Calculations of cathode-fall characteristics. J. Appl. Phys. 33 9 (1962) 2789-2794
39. Barnes M.S., Colter T.J., and Elta M.E. A staggered-mesh finite-difference numerical method for solving the transport equations in low-pressure rf glow discharges. J. Comput. Phys. 77 1 (1988) 53-72
40. Hammond E.P., Mahesh K., and Moin P. A numerical method to simulate radio-frequency plasma discharges. J. Comput. Phys. 176 2 (2002) 402-429
41. Fiala A., Pitchford L.C., and Boeuf J.P. Two-dimensional, hybrid model of low-pressure glow discharges. Phys. Rev. E 49 6 (1994) 5607-5622
42. Huppert G.L., Sawin H.H., and Brown R.A. Spectral element analysis of radio-frequency glow discharge. Chem. Eng. Sci. 49 10 (1994) 1601-1611
43. Kholsa P.K., and Rubin S.G. A diagonally dominant second-order accurate implicit scheme. Comput. Fluids 2 (1974) 207-209
44. Ferziger J.H., and Peric M. Computational Methods for Fluid Dynamics. third ed. (2002), Springer, New York
45. Hagelaar G.J.M., de Hoog F.J., and Kroesen G.M.W. Boundary conditions in fluid models of gas discharges. Phys. Rev. E 62 1 (2000) 1452-1454
46. Toro E.F. Riemann Solvers and Numerical Methods for Fluid Dynamics. second ed. (1999), Springer, New York
47. W.J. Goedheer, (private communication).
48. Ballestra L.V., and Sacco R. Numerical problems in semiconductor simulation using the hydrodynamic model: a second-order finite difference scheme. J. Comput. Phys. 195 1 (2004) 320-340
49. Roe P.L. Characteristic-based schemes for the Euler equations. Ann. Rev. Fluid Mech. 18 (1986) 337-365
50. Abramowitz M., and Stegun I.A. Handbook of Mathematical Functions with Formulas, Graphs, and Mathematical Tables. ninth ed. (1964), Dover, New York