Simulation and Model Reduction Methods for an RF Plasma Glow Discharge

Journal of Computational Physics

Volumn 171, Issue 2, 2001, Pages 731-752

  Lin, Yi Hung ^a   Adomaitis, Raymond A ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Collocation; Global basis functions; Glow discharge; Model reduction; Plasma processing; Pseudospectral methods

Indexed keywords

EIGENVALUES AND EIGENFUNCTIONS; PLASMA THEORY;

COLLOCATION; GLOBAL BASIS FUNCTIONS; MODEL REDUCTION; MODEL REDUCTION METHOD; NUMERICAL SOLUTION; PLASMA GLOW; PSEUDOSPECTRAL METHODS; REDUCED BASIS; RF PLASMA; SIMULATION AND MODELING;

GLOW DISCHARGES;

EID: 0000554261     PISSN: 00219991     EISSN: None     Source Type: Journal    
DOI: 10.1006/jcph.2001.6808     Document Type: Article

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