Hybrid laser - Magnetron technology for carbon composite coating

Laser Physics

Volumn 19, Issue 2, 2009, Pages 149-153

  Jelinek M ^a,b   Kocourek, T ^a,b   Kadlec, Ja ^c   Zemek, J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^c MILITARY ACADEMY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPOSITE COATINGS; INERT GASES; MAGNETRONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; TEMPERATURE INDICATING CAMERAS;

CARBON COMPOSITES; CARBON-BASED; DEPOSITION CONDITIONS; FILM PROPERTIES; GEOMETRICAL CONFIGURATIONS; HOMOGENEOUS FILMS; HYBRID LASERS; MAGNETRON DEPOSITIONS; SEM; SIC FILMS; SUBSTRATE TEMPERATURES; THIN-FILM COATINGS; XPS; XRD;

TITANIUM CARBIDE;

EID: 60049090043     PISSN: 1054660X     EISSN: 15556611     Source Type: Journal    
DOI: 10.1134/S1054660X09020017     Document Type: Article

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