Pulsed laser deposition of titanium-carbonitride thin films

Scripta Materialia

Volumn 36, Issue 10, 1997, Pages 1101-1106

  Capano, M A ^a   Voevodin, A A ^a   Bultman, J E ^b   Zabinski, J S ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF DAYTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; LASER ABLATION; MECHANICAL PROPERTIES; NITROGEN; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; TITANIUM CARBIDE; TITANIUM COMPOUNDS;

NITROGEN CONCENTRATION; PULSED LASER DEPOSITION; TITANIUM CARBONITRIDE;

THIN FILMS;

EID: 0043048174     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(97)00014-6     Document Type: Article

References (13)

1. W.J. Sessler, M.S. Donley, J.S. Zabinski, S.D. Walck, and V.J. Dyhouse, Surf. Coat. Tech. 56, 125 (1993).
2. O. Knotek, F. Loffler, and G. Kramer, Surf. Coat. Tech. 54/55, 241 (1992).
3. M.B. Karamis, Thin Solid Films, 217, 38 (1992).
4. E. Bergmann, H. Kaufmann, and R. Schmid, Surf. Coat. Tech., 42, 237 (1990).
5. J.M. Schneider, A.A. Voevodin, C. Rebholz, and A. Matthews, J. Vac. Sci. Technol. A, 13, 2189 (1995); J.M. Schneider, A.A. Voevodin, C. Rebholz, A. Matthews, J.H.C. Hogg, D.B. Lewis, and M. Ives, Surf. Coat. Tech., 74/75, 312 (1995).
6. J.M. Schneider, A.A. Voevodin, C. Rebholz, and A. Matthews, J. Vac. Sci. Technol. A, 13, 2189 (1995); J.M. Schneider, A.A. Voevodin, C. Rebholz, A. Matthews, J.H.C. Hogg, D.B. Lewis, and M. Ives, Surf. Coat. Tech., 74/75, 312 (1995).
7. P. Hedenqvist, M. Olsson, and S. Hogmark, Surf. Eng. 8, 39 (1992).
8. K. Narasimhan, S.P. Boppana, and D.O. Bhat, Wear, 188, 123 (1995).
9. One common example is the deposition of diamond-like carbon. See the following review: A.A. Voevodin, S.J.P. Laube, S.D. Walck, J.S. Solomon, M.S. Donley and J.S. Zabinski, J. Appl. Phys. 78, 4123 (1995).
10. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).
11. Joint Congress on Powder Diffraction Spectra (JCPDS): Card 6-0614 for TiC and card 38-1420 for TiN. International Centre for Diffraction Data, 12 Campus Boulevard, Newtown Square, PA 19073-3273.
12. J. Deng and M. Braun, Surf. Coat. Technol. 70, 49 (1994).
13. M.A. Capano, J. Appl. Phys. 78, 4790 (1995).