KrF laser deposition combined with magnetron sputtering to grow titanium-carbide layers

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 101-105

  Jelinek M ^a   Kocourek, T ^a   Kadlec, J ^b   Vorlicek V ^a   Cernansky M ^a   Studnicka V ^a   Santoni, A ^c   Bohac P ^a   Uherek, F ^d  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b MILITARY ACADEMY   (Czech Republic)

^c ENEA   (Italy)

^d INTERNATIONAL LASER CENTER   (Slovakia)

Author keywords

Hybrid deposition; Magnetron sputtering; PLD; TiC film

Indexed keywords

KRYPTON; LASER ABLATION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; THIN FILMS; TITANIUM CARBIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

HYBRID DEPOSITION; ROOM TEMPERATURE; TIC FILM; TITANIUM-CARBIDE LAYERS;

PULSED LASER DEPOSITION;

EID: 33645226992     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.040     Document Type: Conference Paper

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