Magnetron sputter pulsed laser deposition: Technique and process control developments

Surface and Coatings Technology

Volumn 184, Issue 1, 2004, Pages 1-5

  Jones, J G ^a   Voevodin, A A ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Gold; Magnetron; Pulsed laser deposition (PLD); Zirconium

Indexed keywords

CATHODE RAY OSCILLOSCOPES; FEEDBACK CONTROL; PHOTOMULTIPLIERS; PROCESS CONTROL; PULSED LASER DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

NARROW BAND FILTERS; PLUME EMISSIONS;

MAGNETRON SPUTTERING;

COATING;

EID: 2642534345     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.016     Document Type: Article

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