Gas sensing materials based on Ti O2 thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 1, 2009, Pages 538-541

  Iftimie, Nicoleta ^a,b   Luca, D ^a   Lacomi, Felicia ^a   Girtan, Mihaela ^c   Mardare, Diana ^a  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^b NATIONAL INSTITUTE OF RESEARCH AND DEVELOPMENT FOR TECHNICAL PHYSICS   (Romania)

^c UNIVERSITÉ D'ANGERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ETHANOL; GASES; LIQUEFIED PETROLEUM GAS; OXIDE MINERALS; QUARTZ; SPRAY PYROLYSIS; SUBSTRATES; TITANIUM DIOXIDE; X RAY DIFFRACTION;

DIFFERENT SUBSTRATES; EXPOSED TO; GAS SENSING MATERIAL; GAS SENSITIVITY; OPERATING TEMPERATURE; QUARTZ SUBSTRATE; RUTILE STRUCTURE; TITANIUM TETRACHLORIDES;

THIN FILMS;

EID: 59949093276     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3021050     Document Type: Article

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